ASTM E1965-98(2009)..
ASTM E2382-04(2012)..
ASTM E2386-04(2011)..
ASTM E252-06(2013)..
ASTM E2666-09
ASTM E2835-11
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ASTM F1372-93(2012)
Standard Test Method for Scanning Electron Microscope (SEM) Analysis of Metallic Surface Condition for Gas Distribution System Components
Automatische name übersetzung:
Standard Test Method for Rasterelektronenmikroskop (SEM) Die Analyse der Metalloberflächenbeschaffenheit für die Systemkomponenten Gasverteilung
NORM herausgegeben am 1.7.2012
Informationen über die Norm:
Bezeichnung normen: ASTM F1372-93(2012)
Anmerkung: UNGÜLTIG
Ausgabedatum normen: 1.7.2012
SKU: NS-50075
Zahl der Seiten: 4
Gewicht ca.: 12 g (0.03 Pfund)
Land: Amerikanische technische Norm
Kategorie: Technische Normen ASTM
Kategorie - ähnliche Normen:
Die Annotation des Normtextes ASTM F1372-93(2012) :
Keywords:
components, contamination, gas distribution, metallic surface condition, SEM analysis, semiconductor processing, surface condition, ICS Number Code 17.040.20 (Properties of surfaces)
Ergänzende Informationen
| Significance and Use | ||
|
4.1 The purpose of this test method is to define a procedure for testing components being considered for installation into a high-purity gas distribution system. Application of this test method is expected to yield comparable data among components tested for purposes of qualification for this installation. |
||
| 1. Scope | ||
|
1.1 This test method covers the testing of interior surfaces of components such as tubing, fittings, and valves for surface morphology. 1.2 This test method applies to all surfaces of tubing, connectors, regulators, valves, and any metal component, regardless of size. 1.3 Limitations: 1.3.1 This methodology assumes a SEM operator skill level typically achieved over a 12-month period. 1.3.2 This test method shall be limited to the assessment of pits, stringer, tears, grooves, scratches, inclusions, stepped grain boundaries, and other surface anomalies. However, stains and particles that may be produced during specimen preparation should be excluded in the assessment of anomalies. 1.4 The values stated in SI units are to be regarded as the standard. The inch-pound units given in parentheses are for information only. 1.5 This standard does not
purport to address all of the safety concerns, if any, associated
with its use. It is the responsibility of the user of this standard
to establish appropriate safety and health practices and determine
the applicability of regulatory limitations prior to use.
SRM 20690 SEM Performance Standard |
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