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Standard Test Method for Energy Dispersive X-Ray Spectrometer (EDX) Analysis of Metallic Surface Condition for Gas Distribution System Components
Automatische name übersetzung:
Standard Test Method for Energy Röntgenspektrometer (EDX) Analyse der Metalloberflächenbeschaffenheit für Systemkomponenten Gasverteilung
NORM herausgegeben am 1.7.2012
Bezeichnung normen: ASTM F1375-92(2012)
Anmerkung: UNGÜLTIG
Ausgabedatum normen: 1.7.2012
SKU: NS-50084
Zahl der Seiten: 4
Gewicht ca.: 12 g (0.03 Pfund)
Land: Amerikanische technische Norm
Kategorie: Technische Normen ASTM
Keywords:
components, connectors, contamination, EDX, gas distribution components, SEM/EDX, semiconductor processing, surface condition, tubing, ICS Number Code 17.040.20 (Properties of surfaces)
Significance and Use | ||
4.1 The purpose of this test method is to define a procedure for testing components being considered for installation into a high-purity gas distribution system. Application of this test method is expected to yield comparable data among components tested for purposes of qualification for this installation. |
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1. Scope | ||
1.1 This test method establishes a procedure for comparing the elemental composition of normal surfaces with any defects found on the surfaces of metal tubing, fittings, valves, or any metal component. 1.2 This test method applies to all steel surfaces of components such as tubings, connectors, regulators, and valves, regardless of size, style, or type. 1.3 Limitations: 1.3.1 This test method is intended for use by scanning electron microscope/energy dispersive x-ray spectrometer (SEM/EDX) operators with skill level typically achieved over a twelve-month period. 1.3.2 SEM used for this study should conform to those limitations outlined in Test Method F1372 and should have a minimum point-to-point resolution of 30 nm. 1.4 The values stated in SI units are to be regarded as the standard. The inch-pound units given in parentheses are for information only. 1.5 This standard does not
purport to address all of the safety concerns, if any, associated
with its use. It is the responsibility of the user of this standard
to establish appropriate safety and health practices and determine
the applicability of regulatory limitations prior to use.
Standard Test Method for Scanning
Electron Microscope (SEM) Analysis of Metallic Surface Condition
for Gas Distribution System Components |
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