ASTM F1398-93(2012)..
ASTM F1901-10
ASTM F2349-04(2010)..
ASTM F2536-06b(2011)..
ASTM F2769-10
ASTM F2805-11
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ASTM F1396-93(2012)
Standard Test Method for Determination of Oxygen Contribution by Gas Distribution System Components
Automatische name übersetzung:
Standard Test Methode zur Bestimmung der Sauerstoff Beitrag von Systemkomponenten Gasverteilung
NORM herausgegeben am 1.7.2012
Informationen über die Norm:
Bezeichnung normen: ASTM F1396-93(2012)
Anmerkung: UNGÜLTIG
Ausgabedatum normen: 1.7.2012
SKU: NS-50147
Zahl der Seiten: 8
Gewicht ca.: 24 g (0.05 Pfund)
Land: Amerikanische technische Norm
Kategorie: Technische Normen ASTM
Kategorie - ähnliche Normen:
Die Annotation des Normtextes ASTM F1396-93(2012) :
Keywords:
components, contamination, gas distribution, oxygen analyzer, oxygen contribution, oxygen outgassing, semiconductor processing, ICS Number Code 23.040.01 (Pipeline components in general. Pipelines)
Ergänzende Informationen
| Significance and Use |
|
3.1 This test method defines a procedure for testing components being considered for installation into a high-purity gas distribution system. Application of this test method is expected to yield comparable data among components tested for purposes of qualification for this installation. |
| 1. Scope |
|
1.1 This test method covers a procedure for testing components for oxygen contribution to ultra-high purity gas distribution systems at ambient temperature. In addition, this test method allows testing of the component at elevated ambient temperatures as high as 70°C. 1.2 This test method applies to in-line components containing electronics grade materials such as those used in a semiconductor gas distribution system. 1.3 Limitations: 1.3.1 This test method is limited by the sensitivity of current instrumentation, as well as the response time of the instrumentation. This test method is not intended to be used for test components larger than 12.7-mm (1/2-in.) outside diameter nominal size. This test method could be applied to larger components; however, the stated volumetric flow rate may not provide adequate mixing to ensure a representative sample. Higher flow rates may improve the mixing but excessively dilute the sample. 1.3.2 This test method is written with the assumption that the operator understands the use of the apparatus at a level equivalent to six months of experience. 1.4 The values stated in SI units are to be regarded as the standard. The inch-pound units given in parentheses are for information only. 1.5 This standard does not purport to address all of the safety concerns, if any, associated with its use. It is the responsibility of the user of this standard to establish appropriate safety and health practices and determine the applicability of regulatory limitations prior to use. Specific hazard statements are given in Section 6. |
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