Standard Test Method for Determination of Surface Roughness by Scanning Tunneling Microscopy for Gas Distribution System Components
NORM herausgegeben am 10.6.1999
Designation standards: ASTM F1438-93(1999)
Note: UNGÜLTIG
Publication date standards: 10.6.1999
The number of pages: 10
Approximate weight : 30 g (0.07 lbs)
Country: American technical standard
Kategorie: Technische Normen ASTM
Keywords:
Gas distribution systems, Microscopic examination-electronic materials, Roughness, Scanning tunneling microscopy, Semiconductor clean rooms, Stainless steel-gas distribution systems, Surface analysis-electronic components/devices, Texture, Topography, Tunneling, gas distribution system components-surface roughness, by scanning, tunneling microscopy, test, ICS Number Code 17.040.20 (Properties of surfaces)