ASTM F576-00

Standard Test Method for Measurement of Insulator Thickness and Refractive Index on Silicon Substrates by Ellipsometry

NORM herausgegeben am 10.6.2001

Englisch -
PDF - sofortiges Download (75.10 EUR)

The information about the standard:

Designation standards: ASTM F576-00
Note: UNGÜLTIG
Publication date standards: 10.6.2001
The number of pages: 9
Approximate weight : 27 g (0.06 lbs)
Country: American technical standard
Kategorie: Technische Normen ASTM

Annotation of standard text ASTM F576-00 :

Keywords:
dielectric thickness, ellipsometry, index of refraction, insulator thickness, refractive index, silicon dioxide, ICS Number Code 29.045 (Semiconducting materials)